Growth mechanisms and modeling for metalorganic chemical vapor deposition selective-area epitaxy on InP substrates
Bibliographic record
Abstract
Selective area epitaxy of InP on masked (100) InP substrates is studied. InP layers are deposited between pairs of SiO2 stripes using low-pressure metalorganic chemical vapor deposition. Layer thickness is investigated by surface profiling and scanning electron microscopy. For growth between oxide stripes, the growth velocity is enhanced by lateral diffusion of growth species from the masked region to the exposed region. Two transport mechanisms are known to exist: vapor phase diffusion and surface migration. However, most existing quantitative models focus only on the former. A new computational model, based on the diffusion equation with time dependent boundary conditions, is presented which describes the growth enhancement component due to surface migration. The role played by surface migration is shown to depend on nominal film thickness. The model correctly predicts a super growth enhanced region adjacent to the oxide. Previous quantitative models have not successfully described this aspect of growth near the oxide film.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.002 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".