Growth mechanisms and modeling for metalorganic chemical vapor deposition selective-area epitaxy on InP substrates
Why this work is in the frame
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Bibliographic record
Abstract
Selective area epitaxy of InP on masked (100) InP substrates is studied. InP layers are deposited between pairs of SiO2 stripes using low-pressure metalorganic chemical vapor deposition. Layer thickness is investigated by surface profiling and scanning electron microscopy. For growth between oxide stripes, the growth velocity is enhanced by lateral diffusion of growth species from the masked region to the exposed region. Two transport mechanisms are known to exist: vapor phase diffusion and surface migration. However, most existing quantitative models focus only on the former. A new computational model, based on the diffusion equation with time dependent boundary conditions, is presented which describes the growth enhancement component due to surface migration. The role played by surface migration is shown to depend on nominal film thickness. The model correctly predicts a super growth enhanced region adjacent to the oxide. Previous quantitative models have not successfully described this aspect of growth near the oxide film.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it