High resolution sampling electrostatic force microscopy using pulse width modulation technique
Bibliographic record
Abstract
This article presents a sampling electrostatic force microscopy technique for high frequency integrated circuit internal measurement that utilizes a pulse width modulation method. The electrostatic force microscope is a class of scanning probe microscopes that is capable of providing noninvasive measurements of the electrical signals inside operating integrated circuits with very high spatial resolution. With this technique, the internal circuit voltage is determined by sensing the local electrostatic force on a miniature probe cantilever that is closely positioned above the circuit test point. The ability to extract repetitive voltage wave forms using direct force measurement is typically limited by the mechanical response of the probe. To overcome the measurement bandwidth limitation of the electrostatic force microscope previous methods have employed a modulated high bandwidth sampling pulse approach. The temporal resolution of these pulse sampling methods is limited by the pulse width. This article presents a pulse width modulation method. The resolution of the pulse width modulation technique is not dependent on the pulse width, but rather on the modulation depth. This enhances measurement resolution several times more than previous methods. The current instrument has a voltage sensitivity of 10 mVrms/Hz1/2.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".