The Role of Passivation Layer during Thermal Annealing for Oxide Semiconductor Thin Films
Bibliographic record
Abstract
The change of the resistance of active films during thermal annealing was monitored under the split of passivation layers and active layers. ALD deposited Al2O3 layer and PECVD deposited SiO2 layer were applied for the passivation layer and sputter deposited Al-doped InZnSnO and InGaZnO were applied for the active layer. It is found that Al2O3 passivation layer supplies dopants to the active interface during high temperature annealing and the side wall of Al:IZTO pattern contains many defects, which become conductive during high temperature annealing through detailed measurement of resistance of patterned oxide semiconductor thin films with various sizes. It is suggested that PECVD deposited SiO2 layer with proper pre-treatment (possibly N2O plasma treatment) will be best candidate for the passivation layer in the oxide TFTs, especially in the case of oxide TFTs with high mobility.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".