Tilted nanostructure fabrication by electron beam lithography
Bibliographic record
Abstract
Periodic tilted nanostructures over large area have various applications. In this work tilted nanostructures were created by SEM scanning of electron beam resists with the substrate tilted at 45°. The key to the process is the usage of the dynamic focus function that is available for most SEM systems for imaging purpose (but not for lithography), as otherwise the tilted substrate will be out of focus of the electron beam. The pattern created by this method is limited to periodic pillar or hole array using negative or positive resist, respectively, with the number of pillars or holes per scan given by the image resolution (e.g., 1024 × 768). The diameter of the pillars or holes was determined by the exposure dose, which is in turn determined by the beam current and scan speed (scanning time per frame). The array period is controlled by the magnification (that determines image area, e.g., 1 mm2) and image resolution. The pillar or hole pattern in the resist can be further transferred to another material such as Au by electroplating.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".