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Record W2005351648 · doi:10.1116/1.4754809

Tilted nanostructure fabrication by electron beam lithography

2012· article· en· W2005351648 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012
Typearticle
Languageen
FieldEngineering
TopicAdvancements in Photolithography Techniques
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsResistElectron-beam lithographyLithographyScanning electron microscopeMaterials scienceOpticsSubstrate (aquarium)NanostructureNanolithographyFabricationX-ray lithographyStencil lithographyResolution (logic)Electron beam-induced depositionOptoelectronicsNanotechnologyScanning transmission electron microscopyPhysicsLayer (electronics)Computer science

Abstract

fetched live from OpenAlex

Periodic tilted nanostructures over large area have various applications. In this work tilted nanostructures were created by SEM scanning of electron beam resists with the substrate tilted at 45°. The key to the process is the usage of the dynamic focus function that is available for most SEM systems for imaging purpose (but not for lithography), as otherwise the tilted substrate will be out of focus of the electron beam. The pattern created by this method is limited to periodic pillar or hole array using negative or positive resist, respectively, with the number of pillars or holes per scan given by the image resolution (e.g., 1024 × 768). The diameter of the pillars or holes was determined by the exposure dose, which is in turn determined by the beam current and scan speed (scanning time per frame). The array period is controlled by the magnification (that determines image area, e.g., 1 mm2) and image resolution. The pillar or hole pattern in the resist can be further transferred to another material such as Au by electroplating.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.002
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.061
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0020.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0020.002
Science and technology studies0.0000.001
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.218
Teacher spread0.212 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it