Tuning the electrical resistivity of pulsed laser deposited TiSiOx thin films from highly insulating to conductive behaviors
Bibliographic record
Abstract
We report on the successful growth of amorphous TiSiOx thin films by means of pulsed-laser ablation of a TiO2/SiO2 composite target in a high-vacuum chamber. The room-temperature resistivity of the TiSiOx films is found to decrease by more than 6 orders of magnitude (i.e., from ∼2×104 to 10−2 Ω cm) when their substrate deposition temperature (Td) is increased from 20 to 600 °C. On the other hand, by subjecting these films to a post-deposition annealing at 600 °C in oxygen atmosphere, they become highly insulating with a resistivity level as high as 2×1010 Ω cm, regardless of the Td value. The presence of conductive titanium silicide and titanium sub-oxide local phases in the as-deposited TiSiOx films, as revealed by photoelectron spectroscopy analyses, appears to be the cause of the observed tremendous change in the film resistivity. In particular, it is shown that the resistivity of the TiSiOx films is strongly correlated with their oxygen content.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".