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Record W2006908714 · doi:10.1063/1.1516866

Effect of aging on wettability of silicon surfaces modified by Ar implantation

2002· article· en· W2006908714 on OpenAlexafffund
Mathieu Chassé, J.R.H. Ross

Bibliographic record

VenueJournal of Applied Physics · 2002
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsInstitut National de la Recherche Scientifique
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsSiliconX-ray photoelectron spectroscopyContact angleArgonMaterials scienceFluenceWettingOxideAnalytical Chemistry (journal)TorrIrradiationIon implantationLayer (electronics)Silicon oxideOxygenIonChemistryNanotechnologyComposite materialChemical engineeringMetallurgySilicon nitride

Abstract

fetched live from OpenAlex

The contact angles of most surfaces modified by ion implantation change with the passage of time. The aim of this experiment is to better understand the mechanism leading to the aging of argon implanted silicon oxide surfaces. Coupons of silicon with its native oxide layer have been irradiated by means of 3 keV Ar ions with a fluence of 1.8×1016 Ar/cm2. Some of the implantations have been performed under oxygen partial pressure (∼5×10−5 Torr). The samples have been characterized at different periods of time after the implantation, by means of contact angle hysteresis measurements and angle resolved x-ray photoelectron spectroscopy (ARXPS). Irradiation with Ar ions has produced a more hydrophilic surface immediately after implantation. With the passage of time, the contact angles have increased both in ambient air and in argon atmosphere. Characterization by means of XPS has shown that there is with time a small increase of the O concentration as well as a small decrease of the quantity of Ar in the silicon oxide surfaces. The shape of the C 1s and Si 2p spectra and their details are also slightly modified with the passage of time. A model using the ARXPS measurements suggests that for the samples implanted without oxygen, the aging would be principally due to the spreading of a natural carbonaceous surface layer dispersed into islands after the Ar implantation. The layer being more hydrophobic than the silicon oxide, its spreading would increase the apparent contact angles. On the other hand, the increase of the carbon concentration in the carbonaceous layer would produce a more hydrophobic surface and would be responsible for the aging of the samples implanted in O2 partial pressure. Results obtained by means of a simple model and the Cassie’s equation suggest that for the samples implanted without O2 gas, the contact angles of the substrate and the carbonaceous layer are 5° and 110°, respectively. The apparent contact angle obtained with the Cassie’s equation is in good agreement with the experimental measurements.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.078
Threshold uncertainty score0.336

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.225
Teacher spread0.214 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations16
Published2002
Admission routes2
Has abstractyes

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