120 °C fabrication technology for a-Si:H thin film transistors on flexible polyimide substrates
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Bibliographic record
Abstract
In this article, we report a fabrication process for hydrogenated amorphous silicon (a-Si:H) thin film transistors (TFT) at 120 °C on flexible Kapton® substrates for large-area imaging applications. The samples are based on the bottom-gate inverted staggered TFT structure. Initially, both sides of the substrate are coated by amorphous silicon nitride (a-SiNx:H), followed by 120 nm of aluminum (Al) film for the gate. After gate patterning, a trilayer is deposited at 120 °C by plasma-enhanced chemical vapor deposition comprising of 250 nm a-SiNx:H gate dielectric, 50 nm a-Si:H, and 250 nm top (passivation) a-SiNx:H. After opening the contact windows, we deposit 35 nm of n+ a-Si:H at 120 °C. Next, a 1 μm Al top contact layer is deposited. The a-Si:H films are deposited from a gas mixture of silane (SiH4) and hydrogen. For the n+ a-Si:H layer, a hydrogen-diluted (1% PH3+99% SiH4) mixture is used. The a-SiNx:H films are deposited from a helium-diluted mixture of silane, ammonia and nitrogen. Dry etching is used except for the metal layers, where wet etching is used. The TFTs show an off-current less than 10−12 A, and an on-current of more than 10−6 A, thus giving an on/off current ratio greater than 106. The effective device mobility, μeff, is about 0.4 cm2/V s.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.003 | 0.003 |
| Science and technology studies | 0.000 | 0.002 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it