High‐power MEMS switch enabled by carbon‐nanotube contact and shape‐memory‐alloy actuator
Bibliographic record
Abstract
Abstract A forest of vertically aligned carbon nanotubes (CNTs) is integrated as an electrical contact material with a high‐power, normally‐open switch based on micro‐electro‐mechanical systems (MEMS) technology. A shape‐memory‐alloy (SMA) cantilever is thermally actuated to enable switching between the movable CNT forest and the copper electrode formed on the SMA. The out‐of‐plane SMA actuator provides high forces to enable distributed contacts with the CNT forest, achieving low contact resistances and high ON/OFF resistance ratios. The ON state of the switch shows contact resistances as low as 35 Ω with a dependence on the operating current. The device operation is performed with over 5‐W input powers. Long‐term operation with more than 1 × 106switching cycles is demonstrated. The results indicate that a combination of the CNT‐based contact and the SMA actuator may be a promising path to realizing reliable MEMS contact switches for high‐power applications.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".