Characterization of Ultrathin Electroless Barriers Grown by Self-Aligned Deposition on Silicon-Based Dielectric Films
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
A self-aligned, electrochemically integrated seeding/plating approach is developed for fabricating patterns of cobalt- (or nickel-) based metallic barriers and copper films selectively on silicon-based dielectric (hybrid siloxane-organic polymer and films using electroless plating. High-resolution X-ray absorption spectroscopy, transmission electron microscopy, atomic force microscopy, and grazing-incidence X-ray diffractometry indicate that, after they have been appropriately pretreated by a gaseous plasma or and basic aqueous solutions that contain sufficient amounts of peroxide hydrogen the dielectric films can adsorb highly populated metallic (nickel or cobalt) precipitates of sizes between 2 and 4 nm, which catalyze the deposition of ultrathin (⩽20 nm) barriers. The barriers are initially highly resistive and contain ultrafine (3-5 nm) crystallites embedded in amorphous-like, 20 nm grains, but become highly conductive (50-80 μΩ-cm) following optimal annealing at temperatures ⩾470°C because of crystallization, grain growth, and precipitation of Finally, the capacity of this method to fabricate "self-aligned" patterns of barrier and copper is established, and the adhesion strength and effectiveness of the barriers against copper's diffusion/drift are quantified. The importance of the plasma pretreatment and the use of hydrogen peroxide (in the SC-1 solution) is also addressed. © 2004 The Electrochemical Society. All rights reserved.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it