Study of Interactions of Hf and SiO<sub>2</sub> Film for High-k Materials
Bibliographic record
Abstract
Hf adsorption on thin SiO2 films was carried out using an ultrahigh-vacuum system with e-beam evaporation. The interaction of adsorbed Hf and SiO2 films was studied by Auger electron spectroscopy (AES), atomic force microscopy (AFM), and current–voltage (I–V) measurements. The leakage current of the SiO2 films increased with Hf adsorption temperature. The dielectric properties of the SiO2 layer were markedly degraded by Hf adsorption even at 300 °C. Additionally, Hf adsorbed on a SiO2 (6.3 nm)/Si substrate at 900 °C penetrated through the SiO2 layer and reacted with the Si substrate forming large concavities. Otherwise, Si diffused from the SiO2/Si interface to the surface of adsorbed Hf.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".