Two-dimensional radio-frequency sheath dynamics over a nonflat electrode with perpendicular magnetic field
Bibliographic record
Abstract
A self-consistent fluid model is developed to simulate the radio-frequency (rf) plasma sheath dynamics over a nonflat electrode, with a magnetic field applied perpendicular to it. The model consists of the two-dimensional (2D) time-dependent fluid equations, coupled with the Poisson equation, and it uses an equivalent-circuit model to self-consistently determine the relationship between the instantaneous voltage at the rf-biased electrode and the sheath thickness. In addition to the usual plasma molding effects, different properties of the azimuthal ion flow associated with the E×B drift are observed and studied under varying discharge pressures and the magnetic field intensities. It is found that the azimuthal flow exhibits rather nonuniform distribution with a peak around the edge of a hole in the electrode. In addition, when the discharge pressure increases, the velocity of the azimuthal ion flow, as well as the velocities of ion flow in all other directions, are found to decrease, whereas the sheath edge is found to move closer to the electrode. While the variation of the magnetic field is found to have no significant effect on the sheath structure, the azimuthal ion flow velocity is found to increase in proportion to the magnetic field.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".