MétaCan
Menu
Back to cohort
Record W2018854595 · doi:10.1088/0960-1317/14/7/002

Design and modeling of a MEMS bidirectional vertical thermal actuator

2004· article· en· W2018854595 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Micromechanics and Microengineering · 2004
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Waterloo
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsMicroelectromechanical systemsActuatorThermalMechanical engineeringMaterials scienceEngineeringElectrical engineeringOptoelectronicsPhysics

Abstract

fetched live from OpenAlex

In this paper, a new micro electro-thermal actuator with bidirectional vertical motion is introduced, analyzed and tested. In traditional vertical electro-thermal actuators, the arms of actuators are fabricated with different widths to provide high and low electrical resistance for the hot and cold arms. Applying electrical current to the arms results in different thermal expansions between the hot and cold arms, which force the tip of the device to bend. The new bidirectional vertical thermal actuator (BVTA) eliminates the parasitic electrical resistance of the cold arm through the use of a 'U' shape structure. This U-shape structure provides a larger deflection with improved electrical efficiency due to the use of an active return current pass. The U-shape actuator is more beneficial in applications such as variable capacitors where a larger deflection is needed to increase the tuning range. For analysis and design purposes, an effective method to transfer the continuous system to a lumped model is presented. Simulation and test results are provided to show the deflection and effects of the design parameters on the actuator performance.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.298
Threshold uncertainty score0.432

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.201
Teacher spread0.189 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it