Spectroscopic photothermal radiometry as a deep subsurface depth profilometric technique in semiconductors
Bibliographic record
Abstract
The theoretical and experimental aspects of spectroscopic photothermal radiometry (PTR) of semiconductors are presented and the potential of the technique for depth profilometry is established. A three-dimensional model of the PTR signal from a semiconductor excited by light of arbitrary optical penetration depth is presented. Numerical simulations of the PTR response to the electronic transport parameters and the optical penetration depth of the excitation source are presented. Intensity-modulated frequency scans and two-dimensional surface scans at fixed frequencies have been performed at several different absorption depths on a Si wafer with various degrees of mechanical damage introduced to either the front or the back surface. The electronic transport parameters obtained from fitting the frequency scans to the theoretical model and analysis of the experimental curves show that while the surface recombination velocities extracted from the fits do not vary significantly with excitation wavelength, the carrier recombination lifetime and the overall sensitivity of the photothermal radiometric signal to spatially localized damage is strongly influenced by the proximity of the injected excess carrier density centroid to the defect location. This correlation between the sensitivity of the PTR signal to a localized defect and the proximity of the injected carriers to the defect demonstrates the potential for spectroscopic PTR as a depth profilometric technique for semiconductors.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.005 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".