MétaCan
Menu
Back to cohort
Record W2020646746 · doi:10.1143/jjap.39.2189

Measurement of Copper Drift in Methylsilsesquiazane-Methylsilsesquioxane Dielectric Films

2000· article· en· W2020646746 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

fundA Canadian funder is recorded on the work.
no affNo Canadian affiliation: this work is invisible to an affiliation-only frame.
No Canadian affiliation. An affiliation-only frame, the usual design, would never have seen this work. It is one of the works that make the case for inverting the frame.

Bibliographic record

VenueJapanese Journal of Applied Physics · 2000
Typearticle
Languageen
FieldMaterials Science
TopicCopper Interconnects and Reliability
Canadian institutionsnot available
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsMaterials scienceTime-dependent gate oxide breakdownDielectricDielectric strengthIonAnalytical Chemistry (journal)Leakage (economics)CapacitorElectric fieldThreshold voltagePolyimideCopperChemical vapor depositionStress (linguistics)VoltageOptoelectronicsGate dielectricComposite materialElectrical engineeringTransistorMetallurgyChemistry

Abstract

fetched live from OpenAlex

Measurement of Cu drifts in methylsilsesquiazane-methylsilsesquioxane dielectric films in the presence of an electric field was conducted using bias-temperature stress (BTS) and capacitor-voltage ( C V ) analysis as well as time dependent dielectric breakdown (TDDB) stress. The amount of Cu ions in the dielectric films can be estimated making use of the flatband voltage shift Δ V F B from the BTS. Comparing the flatband voltage measured by C V analysis with the leakage current integrated over time, it is found that the main content of the leakage current during BTS is ionic current that can be attributed to the drift of Cu and mobile ions. The Cu ions cause the leakage current during TDDB stress to increase. The drift rate of Cu in methylsilsesquioxane is lower than the reported values in polyarylene ether (PAE) and fluorinated polyimide (FPI), and larger than that in plasma enhanced chemical vapor deposition (PE C V D)-SiON.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.002
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.014
Threshold uncertainty score0.968

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0020.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.015
GPT teacher head0.245
Teacher spread0.231 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it