The Effect of Silicide Processing on Stress Reduction in Silicon Device Structures with Strained SiGe Elements
Bibliographic record
Abstract
Intrinsic mechanical stresses in device structures with strained SiGe and Ni silicide have been studied. Stresses in blanket films were derived from wafer curvatures after different stages of device processing. The measurement suggested that the temperature coefficient of NiSi linear expansion equals 1.16⋅10-5 K-1. Experiments showed that silicide films on epitaxial layers of SiGe compensated SiGe stresses in a much greater degree compared to what would follow from the thermal contraction model. Electron microscopy revealed that NiSi(Ge) films formed on SiGe had rough surfaces reducing overall stresses in Si/SiGe/NiSi structures. Computer simulations of MOSFETs with embedded SiGe Source/Drain regions indicated that partial consumption of SiGe layers at silicidation, tensile stress developed in NiSi films due to the thermal contraction and silicide-SiGe interface roughness might reduce compressive stresses in MOSFET channels by 15 - 40%.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".