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Record W2026005718 · doi:10.1021/cm020236x

Economical Sputtering System To Produce Large-Size Composition-Spread Libraries Having Linear and Orthogonal Stoichiometry Variations

2002· article· en· W2026005718 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueChemistry of Materials · 2002
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsDalhousie University
Fundersnot available
KeywordsWaferSputteringStoichiometryRotation (mathematics)PerpendicularTernary operationSubstrate (aquarium)Materials scienceDeposition (geology)Phase (matter)Computer scienceNanotechnologyThin filmGeometryChemistryMathematicsArtificial intelligence

Abstract

fetched live from OpenAlex

A multitarget sputtering machine with a water-cooled rotating substrate table has been modified to produce films on 75 mm × 75 mm wafers which map large portions of ternary phase diagrams. The system is unconventional because the stoichiometries of the elements sputtered on the wafer vary linearly with position and in an orthogonal manner. Subsequent screening of film properties is therefore quite intuitive, since the compositional variations are simple. Depositions are made under continuous rotation, so either intimate mixing of the elements (fast rotation) or artificial layered structures (slow rotation) can be produced. Rotating subtables mounted on the main rotating table hold the 75 mm × 75 mm substrates. Stationary mask openings over the targets and mechanical actuators that rotate the subtables in a precise manner accomplish the linear and orthogonal stoichiometry variations. Deposition of a film spanning the range SiSn x Al y (0 < x, y < 1), with Sn content increasing parallel to one edge on the wafer and Al content increasing in a perpendicular direction, is given to illustrate the effectiveness of the method. Since the system was easily and inexpensively built, it has enabled our research program in combinatorial materials synthesis to begin without large scale funding.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.003
Threshold uncertainty score0.745

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.198
Teacher spread0.187 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it