High-Q silicon micromachined cavity resonators at 30 GHz using the split-block technique
Bibliographic record
Abstract
Bulk micromachining of silicon wafers is a promising technique for use in deep three-dimensional waveguide fabrication. Past efforts to realise a high-quality cavity resonator with such a procedure have resulted in lower than expected unloaded quality factors (Q0). A new design for micromachined cavities is presented, that is based upon the split-block technique used in traditional waveguides. Specifically, this design solves poor contact issues involved with the final stages of fabrication encountered in previous topologies of micromachined cavities. Measurement results of four resonant modes between 30 GHz and 52 GHz for a coaxial-fed micromachined cavity are presented. These are compared with simulated values from Ansoft's high frequency structure simulator (HFSS). A measured unloaded Q0 of 4550 for the dominant TE101 mode at 29.326 GHz compares very well with the simulated value of 4490.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".