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Record W2028611295 · doi:10.1049/ip-map:20040898

High-Q silicon micromachined cavity resonators at 30 GHz using the split-block technique

2004· article· en· W2028611295 on OpenAlexaff
Micah Stickel, P.C. Kremer, George V. Eleftheriades

Bibliographic record

VenueIEE Proceedings - Microwaves Antennas and Propagation · 2004
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Toronto
Fundersnot available
KeywordsHFSSResonatorSurface micromachiningFabricationMaterials scienceBlock (permutation group theory)WaferWaveguideSiliconCoaxialQ factorOptoelectronicsSilicon on insulatorMicroelectromechanical systemsDeep reactive-ion etchingElectronic engineeringAcousticsElectrical engineeringEngineeringEtching (microfabrication)PhysicsComposite material

Abstract

fetched live from OpenAlex

Bulk micromachining of silicon wafers is a promising technique for use in deep three-dimensional waveguide fabrication. Past efforts to realise a high-quality cavity resonator with such a procedure have resulted in lower than expected unloaded quality factors (Q0). A new design for micromachined cavities is presented, that is based upon the split-block technique used in traditional waveguides. Specifically, this design solves poor contact issues involved with the final stages of fabrication encountered in previous topologies of micromachined cavities. Measurement results of four resonant modes between 30 GHz and 52 GHz for a coaxial-fed micromachined cavity are presented. These are compared with simulated values from Ansoft's high frequency structure simulator (HFSS). A measured unloaded Q0 of 4550 for the dominant TE101 mode at 29.326 GHz compares very well with the simulated value of 4490.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.010
Threshold uncertainty score0.870

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.217
Teacher spread0.208 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations9
Published2004
Admission routes1
Has abstractyes

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