Optimization of the ohmic contact processing in InAlN//GaN high electron mobility transistors for lower temperature of annealing
Bibliographic record
Abstract
Abstract In this article, we optimized the ohmic contact processing in InAlN/GaN high electron mobility transistors for the lower temperature of annealing by recessing of metalliza‐tion to approach the 2DEG at the InAlN/GaN interface. The ohmic contacts which were recessed down to 5 nm depth and annealed at 700 °C 2 min. exhibited the contact resistance of 0,39 Ωmm while the channel sheet resistance was 210 Ω/square. These values are comparative to values of contacts processed at more conventional an‐nealing conditions (800 °C, 2 min). Moreover we applied the recessed ohmic contact technology to fabricate Schottky barrier (SB) HEMTs and MOSHEMTs with Al 2 O 3 dielectric film. For MOSHEMTs, we measured the maximal reduction of the gate leakage current by about 6 orders of magnitude if compared with SB HEMTs. The maximal drain current of MOSHEMTs was about 750 mA/mm at V GS = 0 V and the maximal extrinsic transconductance (g me ) reached 101 mS/mm. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.002 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".