A Submicron Multiaxis Positioning Stage for Micro- and Nanoscale Manufacturing Processes
Bibliographic record
Abstract
A piezoelectrically driven, submicron XY-positioning stage with multiprocess capability is developed and then integrated into two micro∕nanoscale manufacturing processes to improve their performance. The design is based on the HexFlex™ mechanism but is modified to improve structural robustness using a combination of factorial design, linear programming, and finite element analysis. Performance analysis reveals travel ranges of 16μm (X-axis) and 8μm (Y-axis), positioning accuracies of 87nm (X-axis) and 92nm (Y-axis), and overall stiffnesses of 32N∕μm (X-axis) and 36N∕μm (Y-axis). A comparison of microfluidic channels manufactured with a micromachine tool (mMT) alone and with the stage stacked on the mMT shows an improvement in feature accuracy from 870nmto170nm. The stage is integrated with an electrochemical deposition setup. Nanowire structures with sharp angles are fabricated. The diameter of these nanowires shows an improvement in uniformity by decreasing the standard deviation of diameter variation from 2.088μmto0.009μm.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".