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Record W2037094614 · doi:10.1063/1.1924894

Diffraction element assisted lithography: Pattern control for photonic crystal fabrication

2005· article· en· W2037094614 on OpenAlexaff
Cheng Lü, X. K. Hu, I. V. Mitchell, R. H. Lipson

Bibliographic record

VenueApplied Physics Letters · 2005
Typearticle
Languageen
FieldPhysics and Astronomy
TopicPhotonic Crystals and Applications
Canadian institutionsWestern University
Fundersnot available
KeywordsPhotoresistLithographyDiffractionPhotonic crystalMaterials scienceOpticsFabricationPhotonicsOptoelectronicsPhotolithographyMaskless lithographyNanolithographyResistElectron-beam lithographyNanotechnologyPhysics

Abstract

fetched live from OpenAlex

Near-field diffraction element assisted lithography or DEAL has been used to fabricate two-dimensional lattice patterns in a photoresist. Specifically, a diffraction element was used to prepattern the coherent output of a laser prior to its capture in a photoresist. The pattern symmetry and spacing can be readily modified with the same experimental arrangement since the near-field diffraction pattern strongly depends on the nature of the diffractive element and the distance between the element and the photoresist. The patterns that are formed can serve as masks for patterning high index materials to create photonic band gap crystals. Alternatively, they have the potential to behave as two-dimensional photonic band gap arrays provided the polymer used exhibits a large enough index contrast.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.643
Threshold uncertainty score0.980

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.010
GPT teacher head0.239
Teacher spread0.229 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations14
Published2005
Admission routes1
Has abstractyes

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