Electronic structure of the Si-C-N amorphous films
Bibliographic record
Abstract
The results of the investigation of amorphous a-SiC x N y films of various compositions by the ultra-soft X-ray emission spectroscopy are presented. The Si L 2, 3, C K α, and N K α emission spectra, which reflect the partial densities of states Si 3s3d, C 2p, and N 2p, respectively, have been measured and analyzed. It has been established that the Si-N chemical bond is similar in type to the Si-C chemical bond and completely substitutes for the Si-C bonds in thin a-SiC x N y films as the oxygen concentration increases. A similar effect is associated with the local agglomeration and subsequent clusterization of carbon atoms in the SiN-enriched regions of the internal volume of the film. A high ability of the a-SiC x N y films to oxidation in air has been established. This has been confirmed by a satisfactory approximation of the Si L 2, 3 X-ray emission spectra of a-SiCN with the use of the superposition of the spectra of γ-Si3N4 and Si2N2O. The relative weight coefficients of the spectra of γ-Si3N4, which have been used to approximate the spectra of thin a-SiC x N y films, are proportional to the values of the Young’s modulus for different values of compositions (different values of x and y).
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".