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Record W2038624949 · doi:10.1116/1.1856477

Pulsed laser deposition of lanthanum monosulfide thin films on silicon substrates

2005· article· en· W2038624949 on OpenAlexaff
Steven B. Fairchild, J. H. Jones, M. Cahay, K. Garre, P. Draviam, P. Boolchand, Xin Wu, D. J. Lockwood

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005
Typearticle
Languageen
FieldEngineering
TopicChalcogenide Semiconductor Thin Films
Canadian institutionsInstitute for Microstructural Sciences
Fundersnot available
KeywordsMaterials sciencePulsed laser depositionNanocrystalline materialThin filmSiliconAmorphous solidLattice constantSubstrate (aquarium)MicroelectronicsSurface roughnessTransmission electron microscopyAnalytical Chemistry (journal)DiffractionOptoelectronicsNanotechnologyOpticsCrystallographyComposite materialChemistry

Abstract

fetched live from OpenAlex

Thin films of lanthanum monosulfide (LaS) have been successfully deposited on Si substrates by pulsed laser deposition. The values of deposition parameters (chamber pressure, substrate temperature, substrate-to-target separation, laser energy, repetition rate, and spot size on the target) leading to a successful growth of films in their cubic rocksalt structure are identified. The films are golden yellow in appearance with a mirror-like surface morphology and possess a sheet resistance around 0.1Ω∕square. X-ray diffraction analysis of thick films (several microns) leads to a lattice constant of 5.863(7)Å, which is close to the bulk LaS value. High-resolution transmission electron microscopy reveals the films to be comprised of nanocrystalline regions separated by amorphous ones. The root-mean-square variation of film surface roughness measured over a 1μm×1μm area is found to be 1.74nm by atomic force microscopy. These films have potential for semiconductor, vacuum microelectronics, and optoelectronics applications.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.216
Teacher spread0.203 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations16
Published2005
Admission routes1
Has abstractyes

Explore more

Same venueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaSame topicChalcogenide Semiconductor Thin FilmsFrench-language works237,207