Effect of Silicon Nitride Cap on the Activation of Implanted Silicon in Gallium Arsenide
Bibliographic record
Abstract
The effect of silicon nitride (SiNx) anneal cap on the activation efficiency (η) of the implanted Si in gallium arsenide (GaAs) was investigated. SiNx films of various N/Si ratios were prepared, changing the NH3/SiH4 source gas ratio in plasma enhanced chemical vapor deposition (PECVD). As a result, η of the n-layer was found to become the maximum when the SiNx had a slightly N-rich composition. Device simulation clarified that the maximum η, which was obtained with an annealing temperature of 805°C, was 75%. Stress measurements at high temperatures demonstrated that the compressive stress increment at 805°C hardly improved η. On the other hand, the amount of the Ga out-diffusion measured by the total reflection X-ray fluorescence (TXRF) was found to correspond to the trend of η. In the activation with the SiNx caps in this study, the Ga out-diffusion was more dominant than the stress.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".