Effect of Silicon Nitride Cap on the Activation of Implanted Silicon in Gallium Arsenide
Bibliographic record
Abstract
The effect of silicon nitride (SiN x ) anneal cap on the activation efficiency (η) of the implanted Si in gallium arsenide (GaAs) was investigated. SiN x films of various N/Si ratios were prepared, changing the NH 3 /SiH 4 source gas ratio in plasma enhanced chemical vapor deposition (PECVD). As a result, η of the n-layer was found to become the maximum when the SiN x had a slightly N-rich composition. Device simulation clarified that the maximum η, which was obtained with an annealing temperature of 805°C, was 75%. Stress measurements at high temperatures demonstrated that the compressive stress increment at 805°C hardly improved η. On the other hand, the amount of the Ga out-diffusion measured by the total reflection X-ray fluorescence (TXRF) was found to correspond to the trend of η. In the activation with the SiN x caps in this study, the Ga out-diffusion was more dominant than the stress.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".