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Record W2040216289 · doi:10.1109/jmems.2015.2388532

Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis

2015· article· en· W2040216289 on OpenAlexaff
Amin Changizi, Ion Stiharu, Benoît Olbrechts, Jean‐Pierre Raskin

Bibliographic record

VenueJournal of Microelectromechanical Systems · 2015
Typearticle
Languageen
FieldEngineering
TopicAdvanced Surface Polishing Techniques
Canadian institutionsConcordia University
Fundersnot available
KeywordsDeflection (physics)Residual stressMaterials scienceRoot mean squareStructural engineeringBiological systemMathematicsOpticsMechanicsComposite materialPhysicsEngineering

Abstract

fetched live from OpenAlex

This investigation presents a method of extraction of the built-in stress in films grown by thin-film deposition or growing in microplate structures. Although thin-film deposition processes are well controlled, the stress values might significantly vary, reaching ±40% of the projected value. The assumption of variance yields more accurate solutions for the deflection than the values obtained by assuming the exact interlaminar stress yielded by the deposition process. The extraction method was used in conjunction with a gradient-based optimization method to evaluate the effective stress based on the response of the microplate to distributed load. The estimation of the deflection in the model versus the experimental method is based on static deflection matching. The estimation of root-mean-square error based on the proposed model was reduced to 0.38% versus the experimental evaluation, while the deflection resulting from the assumption of the nominal interlaminar stress yield errors of up to 40% versus experiments.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0010.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.030
GPT teacher head0.339
Teacher spread0.309 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

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Citations2
Published2015
Admission routes1
Has abstractyes

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