Nanoscale channel and small area amorphous silicon vertical thin film transistor
Bibliographic record
Abstract
This article reports the design of vertical thin film transistors (VTFTs) in hydrogenated amorphous silicon (a-Si:H) technology. This transistor structure offers an elegant method of defining the channel length in nanoscale dimensions by means of dielectric film thickness. In addition, the device area of the vertical TFT structure is less than ∼1∕3 that of the ubiquitous lateral TFT structure. We study the deposition mechanisms to gain insight into the fabrication of VTFTs from a conceptual standpoint. The a-Si:H VTFT reported here advances current state of the art, by demonstrating the first 100nm channel length VTFT with an on/off current ratio of 108, threshold voltage of 2.8V, and a subthreshold slope of 0.8V∕decade. This is the shortest and truly vertical channel a-Si:H TFT reported, hitherto. We propose an application of a-Si:H VTFTs in high-resolution flat-panel electronics with TFT size independent fill factor, promising immense benefits in medical x-ray imaging.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.002 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".