Stacked-etch induced charge loss in Hybrid Floating Gate cells using high-κ Inter-Gate Dielectric
Bibliographic record
Abstract
We investigate the stacked-etch induced charge loss of multi-layer (HfAlO-Al <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> -HfAlO) Inter-Gate Dielectric (IGD) together with a thin Hybrid Floating Gate (HFG), in aggressively scaled planar NAND cells. The results obtained using Bias-Post Program Discharge on no-overlap/overlap capacitors and cells, clearly point out charge loss due to etching damage in Tunnel Oxide (TuOx). On the other hand the inter-gate dielectric damage by stacked etch can be avoided. The etch damage is high with TiN control gate and moderate with amorphous-Si control gate. For short cell featuring Poly-Si control gate, the charge loss occurs through inter-gate dielectric due to the poor interface between inter-gate dielectric / control gate and a degraded intergate dielectric, as suggested by Gate-Side Trap Spectroscopy by Charge Injection and Sensing (GS-TSCIS) and TEM.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".