Photolithographic Deposition of Ruthenium Thin Films by Photochemical Metalorganic Deposition
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Bibliographic record
Abstract
The photochemistry of Ru(tmhd)2(cod) (where tmhd = 2,2,6,6-tetramethyl-3,5- heptanedionate and cod = 1,5-cyclooctadiene) precursor films on Si(111) substrate was used to develop a process for the lithographic deposition of ruthenium oxide films. The photochemical reaction of Ru(tmhd)2(cod) films was monitored by FTIR. Upon exposure the coordinated ligands were lost from the film in a sequential process through an intermediate tentatively, assigned as Ru(tmhd)2 by mass spectral analysis of the material which out gassed from the film and FTIR spectroscopy. The photogenerated films were found to be amorphous ruthenium, by x-ray and electron diffraction experiments, high resolution transmission electron microscopy and Auger electron spectroscopy although, we could not rule out the possibility of some oxygen impurity. Upon annealing in air, thin films of crystalline RuO2 films with the rutile structure were produced. The use of Ru(THMD),sub>2(cod) precursor film to deposit features with 3 μm feature size by contact mask lithography is demonstrated.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it