An Optical Scanner Based on a Cantilever-Type Zipping Actuator
Bibliographic record
Abstract
The modeling, design, fabrication and experimental characterization of an optical scanner based on a cantilever-type electrostatic zipping actuator are presented. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using commercial multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the electrode on the substrate pulls the cantilever down. Force on the warped cantilever closes the gap from the anchor end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical short-circuit. With various annealing temperatures during fabrication, the warp angles of the cantilevers are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this article, we present the design considerations in displacement and control of electrostatic zipping actuator fabricated by the PolyMUMPS process. The arrangement for optical scanning utilizing the zipping actuator is also presented.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".