Progress toward a raster multibeam lithography tool
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
A prototype raster multibeam optics is evaluated for 45 nm mask pilot lithography. A laser beam is split into 32 beamlets, which are modulated acousto-optically then focused onto a photocathode. This generates 32 electron beams which are scanned and focused on a writing surface. Photocathode photoyield and lifetime exceed 200 nA/mW and 100 h per spot, respectively. Photoyield recovers to within 1% after 1 min fully extinguished. The size of the laser spot is 300 nm, full width half maximum (FWHM) and the size of the corresponding electron beam spots is 50 nm (FWHM) at the writing plane. In the first demonstration of multiple electron beam lithography, 200 nm line/space arrays and 100 nm isolated lines were printed with an interim four-beam datapath. Preliminary experiments and a theoretical evaluation indicate that resist outgassing does not significantly reduce photocathode performance. An improved electron-optical column has also been designed, with a 35 nm pixel pitch, and a placement accuracy of <0.8 nm over a 120 μm field of view at the cathode and the scan field of 410×10 μm at the writing plane.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.002 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it