MEMS tunable silicon Fabry-Perot cavity
Bibliographic record
Abstract
In this paper we present an innovative tunable Fabry-Perot cavity micromachined in silicon. A short summary of the theoretical background of these filters is presented, followed by technical requirements for the design of the dielectric mirror composing the Fabry-Perot cavity and the cavity itself. Simulations and experimental data are demonstrated to be in good agreement. An in plane design is used to allow easy fiber alignment. The Fabry-Perot is tuned by an electrostatic comb drive actuator supported by a set of four springs to achieve a uniform modulation of the air gap of the filter. Only 15.4 V are required to tune the Fabry-Perot over 73nm bandwidth (covering more than the whole C-band) with a FWHM varying from 6 to 10nm. Transmission losses are -11dB.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".