Positive and Negative Lithography by Photochemical Metalorganic Deposition from Metal 2-ethylhexanoates
Bibliographic record
Abstract
Direct, resist-free positive photolithographic deposition of various metal oxides was achieved using photochemical metalorganic deposition. The metalorganic precursors, manganese(II) 2-ethylhexanoate, nickel(II) 2-ethylhexanoate and molybdenum(II) 2-ethylhexanoate and mixtures of barium(II) 2-ethylhexanoate and titanium(IV) di-n-butoxide bis(2-ethylhexanoate), were all spin cast as amorphous thin films from solutions. Upon exposure to ultraviolet light, the organic components of the precursor are ejected from the film and the remaining metal is ultimately converted to amorphous metal oxide or mixed metal oxide. The photochemistry of the decomposition reaction of all precursors was monitored by Fourier transform infrared spectroscopy. Upon exposure to UV light irradiation, negative photolithography was observed. However, after a short period of exposure to UV light, positive pattern of the precursor can be developed. When this process is followed by a blanket exposure, the net result is the positive lithographic deposition of the metal oxide. By using these precursors and contact photolithography, the deposition of micron sized features of amorphous manganese, nickel and molybdenum oxide, and Ba1.13T0.17O was achieved, in both the negative and positive lithography methods.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".