Discrete-path transport theory of physical sputtering
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Bibliographic record
Abstract
The fundamentals of low-energy physical sputtering currently attract increasing interest in relation to ion-based and plasma-based micro- and nanofabrication technologies. However, explaining sputtering in the sub-keV bombardment regime has long been a challenge for the kinetic theory, partly because of a simplistic treatment of the surface. Here, transport theory of sputtering is formulated, which includes a more realistic analytical model of the surface in a semi-infinite target. In contrast to the traditional theory, which is based on the linearized Boltzmann equation, the new approach uses the discrete-path master equation for particle transport in matter. Starting from the discrete-path formalism, the deflection of incoming projectiles and focusing of emitted particles when they pass the surface are described by a unified few-collision approach and combined with the bulk master equation through sophisticated boundary conditions. The numerical results are compared with available experiments. Major anisotropies that affect differential sputtering yields in the sub-keV bombardment regime are considered as obtained from the kinetic modeling.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it