The Al<sub>2</sub>O<sub>3</sub>/4H-SiC Interface Investigated by Thermal Dielectric Relaxation Current Technique
Bibliographic record
Abstract
Al2O3 has been grown by Atomic Layer Chemical Vapour Deposition (ALCVD) on ntype 4H-SiC using O3 as an oxidant and tri-methyl-aluminum (TMA) as a precursor. After deposition, annealing at 1000°C during 3h in different atmospheres (Ar, N2 and O2) was performed. Interface properties were studied by Capacitance-Voltage (CV) and Thermal Dielectric Relaxation Current (TDRC) measurements. The highest near-interface trap density (Nit) was deduced to be 4x1012 eV-1cm-2 between 0.36 eV and 0.5 eV below the conduction band, Ec, for O2 annealed samples, 2.8x1012 eV-1cm-2 between 0.42 eV and 0.56 eV below Ec for Ar annealed samples and 2.2x1012 eV-1cm-2 between 0.4 eV and 0.6 eV below Ec for N2 annealed samples. Only samples annealed in Ar exhibit a nearly trap free region close to Ec. Annealing in N2 is found to decrease Nit between 0.3 and 0.7 eV but shows a slightly higher Nit close the conduction band compared to the Ar case.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.004 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.003 |
| Science and technology studies | 0.001 | 0.002 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.003 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".