Photocurrent measurements for oxide charge characterization of high-κ dielectric metal oxide semiconductor capacitors
Bibliographic record
Abstract
Photocurrent-voltage (photo-I-V) measurements for oxide charge characterization of high-κ metal-oxide-semiconductor (MOS) capacitors is a viable technique for quantifying both the oxide charge density and the centroid of charge. The latter information is not obtainable from conventional capacitance-voltage (C-V) measurements. In this paper, the theoretical background for photo-I-V measurements is reviewed and extended to address high-κ dielectric stacks. Experimental results comparing C-V and photo-I-V measurements for oxide charge characterization of Al gated, high-κ HfO2 MOS capacitors is given. For electron injection from Al, it was found that similar oxide charge densities were calculated using photo-I-V (between 5.5×1012 and 6.7×1012cm−2) and C-V (between 4.5×1012 and 5×1012cm−2) measurements. The centroid of trapped charge, x¯∕tox, as defined as a distance from the gate electrode normalized to the dielectric stack thickness was measured to be ∼0.2, which is near the Al electrode and suggests that significant charge trapping is occurring at defects within the HfO2 and not at the HfO2 interface with the thin oxide. Similar measurements using electron injection from the substrate shows that the centroid of trapped charge shifts from near the gate electrode (x¯∕tox=0.22) to the substrate electrode (x¯∕tox=1) as the applied stress bias increases from 0.75to2V. This result is consistent with increased field-assisted detrapping of oxide charge. From photocurrent measurements, it was also determined that the effective barrier height for electron photoinjection from the Al gate to the HfO2 conduction band was 2.6±0.1eV, which is consistent with current knowledge of the HfO2 band structure.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".