Low-temperature Si growth on Si (001): Impurity incorporation and limiting thickness for epitaxy
Bibliographic record
Abstract
We present a structural and chemical analysis of high-vacuum deposited Si films grown on clean or oxidized Si (001) wafers by low-temperature molecular-beam epitaxy. For growth on clean Si, we observed a limiting thickness for epitaxy that decreases with decreasing temperature with an activation energy of 0.47 eV. The onset of defect formation is correlated to a peak in the H impurity concentration. The transition to an amorphous phase is, however, observed beyond the depth where impurities are first observed pointing to surface disorder/roughening as a source of epitaxy breakdown. The O and C content in these films remains low until the film crystallinity has strongly deteriorated and reaches a saturation concentration of 2–4 at. % in the fully amorphous regions. The impurity profiles in amorphous-Si films grown on oxidized Si are similar to those obtained on clean Si when grown at the same temperature and indicate that the impurity uptake depends primarily on residual gas and surface condition. Raman scattering results show the structural changes and evolution of the Si bond configuration.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".