Electronic structure of hydrogenated amorphous Si<sub>1–<i>x</i></sub>N<i><sub>x</sub></i> thin films using soft X‐ray emission and absorption measurements
Bibliographic record
Abstract
Abstract Hydrogenated amorphous silicon nitride thin films (a‐Si 1– x N x :H) with x = 0.46, 0.54, 0.55 and 0.58 have been studied. The optical bandgaps of these materials were 2.41, 2.78, 3.29 and 3.85 eV and Urbach edge bandgaps were 2.80, 3.27, 3.85 and 4.04 eV (W. C. Tan et al., J. Mater. Sci., Mater. Electron. 20 , S15–S18 (2009) [1]), respectively. The bandgaps determined in this work using soft X‐ray spectroscopy (SXS) are 3.92, 4.43, 5.18 and 5.36 ± 0.25 eV. These large bandgaps are most likely due to the surface sensitivity of the SXS measurements and possible oxidation of the films. The conduction and valence band edges are determined using a linear regression fit and the bandgaps show a similar trend to that of the optical bandgap. Using Density Functional Theory (DFT) calculations for the two crystalline phases of silicon nitride the core hole interaction is accounted for in these bandgap determinations. This shows that both N and Si states are involved in bandgap transitions. Comparison of amorphous SXS spectra with that of crystalline phases shows that the Si bonding environment is similar to that of the beta phase while the N bonding environment is similar to that of the gamma phase. This shows there is a degree of short range order in the films similar to that of α,β‐Si 3 N 4 indicating tetrahedral SiN 4 . The spectra also show that the Si states with 3s‐symmetry decrease as a function of nitrogen concentration which is evidence of Si–Si bonds that would increase the Si 3s states. This increase in Si 3s‐states effectively decreases the bandgap. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".