Electronic structure of hydrogenated amorphous Si<sub>1–<i>x</i></sub>N<i><sub>x</sub></i> thin films using soft X‐ray emission and absorption measurements
Bibliographic record
Abstract
Abstract Hydrogenated amorphous silicon nitride thin films (a‐Si1–x Nx:H) with x = 0.46, 0.54, 0.55 and 0.58 have been studied. The optical bandgaps of these materials were 2.41, 2.78, 3.29 and 3.85 eV and Urbach edge bandgaps were 2.80, 3.27, 3.85 and 4.04 eV (W. C. Tan et al., J. Mater. Sci., Mater. Electron. 20, S15–S18 (2009) [1]), respectively. The bandgaps determined in this work using soft X‐ray spectroscopy (SXS) are 3.92, 4.43, 5.18 and 5.36 ± 0.25 eV. These large bandgaps are most likely due to the surface sensitivity of the SXS measurements and possible oxidation of the films. The conduction and valence band edges are determined using a linear regression fit and the bandgaps show a similar trend to that of the optical bandgap. Using Density Functional Theory (DFT) calculations for the two crystalline phases of silicon nitride the core hole interaction is accounted for in these bandgap determinations. This shows that both N and Si states are involved in bandgap transitions. Comparison of amorphous SXS spectra with that of crystalline phases shows that the Si bonding environment is similar to that of the beta phase while the N bonding environment is similar to that of the gamma phase. This shows there is a degree of short range order in the films similar to that of α,β‐Si3N4 indicating tetrahedral SiN4. The spectra also show that the Si states with 3s‐symmetry decrease as a function of nitrogen concentration which is evidence of Si–Si bonds that would increase the Si 3s states. This increase in Si 3s‐states effectively decreases the bandgap. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".