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Record W2056585017 · doi:10.1063/1.1383264

Chemical and thermal stability of titanium disilicide contacts on silicon

2001· article· en· W2056585017 on OpenAlex
O. V. Hul’ko, Rabah Boukherroub, Gregory P. Lopinski

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Applied Physics · 2001
Typearticle
Languageen
FieldPhysics and Astronomy
TopicSemiconductor materials and interfaces
Canadian institutionsSteacie Institute for Molecular Sciences
Fundersnot available
KeywordsMaterials scienceSiliconAnnealing (glass)TitaniumAmmonium fluorideIsotropic etchingScanning tunneling microscopeThermal stabilityMetallurgyEtching (microfabrication)NanotechnologyChemical engineering

Abstract

fetched live from OpenAlex

The suitability of titanium disilicide (TiSi2) contacts for use in electronic transport measurements on chemically modified Si(100) and Si(111) surfaces prepared in ultrahigh vacuum (UHV) or via wet chemical approaches has been examined. Rapid thermal annealing at 900 °C of patterned Ti lines was used to produce the C54 phase of TiSi2. Atomic force microscopy, UHV scanning tunneling microscopy, and resistivity measurements were used to characterize the TiSi2/Si system through different stages of the disilicide formation and subsequent high temperature annealing or wet chemical cleaning and etching. The contacts were found to maintain their integrity after annealing up to 1200 °C or 10 min etching in 40% ammonium fluoride (NH4F). Under these preparation conditions, the silicon surface in the immediate vicinity of the TiSi2 interface remains free from major defects, thus making titanium disilicide a particularly suitable material for constructing platforms for measurements of electrical transport of silicon surfaces as well as nanostructures fabricated on these surfaces.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.009
Threshold uncertainty score0.337

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.017
GPT teacher head0.241
Teacher spread0.224 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it