Chemical and thermal stability of titanium disilicide contacts on silicon
Bibliographic record
Abstract
The suitability of titanium disilicide (TiSi2) contacts for use in electronic transport measurements on chemically modified Si(100) and Si(111) surfaces prepared in ultrahigh vacuum (UHV) or via wet chemical approaches has been examined. Rapid thermal annealing at 900 °C of patterned Ti lines was used to produce the C54 phase of TiSi2. Atomic force microscopy, UHV scanning tunneling microscopy, and resistivity measurements were used to characterize the TiSi2/Si system through different stages of the disilicide formation and subsequent high temperature annealing or wet chemical cleaning and etching. The contacts were found to maintain their integrity after annealing up to 1200 °C or 10 min etching in 40% ammonium fluoride (NH4F). Under these preparation conditions, the silicon surface in the immediate vicinity of the TiSi2 interface remains free from major defects, thus making titanium disilicide a particularly suitable material for constructing platforms for measurements of electrical transport of silicon surfaces as well as nanostructures fabricated on these surfaces.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".