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Record W2061324843 · doi:10.1117/12.721502

Complex MEMS device: microshutter array system for space applications

2007· article· en· W2061324843 on OpenAlexfundno aff
Mary J. Li, Tomoko Adachi, Christine A. Allen, Sachi Babu, Sateesh S. Bajikar, Michael Beamesderfer, R. Bradley, Kevin L. Denis, Nick Costen, Audrey J. Ewin, Dave Franz, Larry A. Hess, Ron Hu, Kamili M. Jackson, M Jhabvala, Dan Kelly, Todd King, G. Kletetschka, A. Kutyrev, Barney Lynch, Timothy M. Miller, H. Moseley, Vilem Mikula, Brent Mott, Lance Oh, James Pontius, D. Rapchun, Chris Ray, Knute Ray, Eric Schulte, Scott Schwinger, Peter K. Shu, R. F. Silverberg, Wayne Smith, Steve Snodgrass, D. Sohl, Leroy Sparr, Rosalind Steptoe-Jackson, Veronica Valeriano, Liqin Wang, Yun Zheng, Chris Zincke

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007
Typearticle
Languageen
FieldEngineering
TopicSpacecraft Design and Technology
Canadian institutionsnot available
FundersCanadian Space AgencyOffice of Naval ResearchGoddard Space Flight CenterEuropean Space AgencyNational Aeronautics and Space Administration
KeywordsJames Webb Space TelescopeMicroelectromechanical systemsShutterOpticsSurface micromachiningMaterials scienceOptical pathOptoelectronicsTelescopePhysicsFabrication

Abstract

fetched live from OpenAlex

A complex MEMS device, microshutter array system, is being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instrument will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size close to 100x200 &mgr;m. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS bulk-micromachining technologies and packaged using single-sided indium flip-chip bonding technology. The MSA flight concept consists of a mosaic of 2 x 2 format of four fully addressable 365 x 171 arrays placed in the JWST optical path at the focal plane.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.024
Threshold uncertainty score0.080

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0010.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.000
Science and technology studies0.0010.000
Scholarly communication0.0010.001
Open science0.0010.001
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0240.006

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.014
GPT teacher head0.235
Teacher spread0.221 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations8
Published2007
Admission routes1
Has abstractyes

Explore more

Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicSpacecraft Design and TechnologyFrench-language works237,207