Fabrication of surface plasmon waveguides and integrated components on ultrathin freestanding membranes
Bibliographic record
Abstract
The fabrication and physical characterisation of waveguides and integrated components on freestanding membranes are described. The waveguides consist of a thin (20–25nm) narrow (∼5μm) Au∕Cr stripe, on an ultrathin (20–30nm) large-area (∼1mm2) freestanding Si3N4 membrane clamped around its perimeter to an underlying Si substrate. The integrated components are implemented with this waveguide and consist of Mach-Zehnder interferometers and couplers. The waveguide and components are dimensioned such that they propagate long-range surface plasmon-polariton waves in a vacuum (air) or H2O background. The fabrication process flow adopted and some specific process steps are described. Physical characterisation was conducted on structures having undergone intermediate process steps and on finished structures, and characterisation results are given and discussed. The structures were found to be robust enough for careful use, and to routinely sustain ∼3μN of point force without shattering.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".