Novel low-temperature variable inductors using porous anodic alumina
Why this work is in the frame
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Bibliographic record
Abstract
In this study, the authors study the benefits of using porous anodic alumina (PAA) as a new material to develop tunable RF micro-electro-mechanical systems (MEMS) inductors. To the authors knowledge, this is the first time that PAA material is proposed and successfully used as a structural material for MEMS devices and for fabrication of tunable inductors. The authors explain the fabrication process for producing tri- and bi-layer of PAA/aluminium or PAA/gold. These structures are used as thermal actuators to provide tunability for the inductor. The PAA layer is fabricated using an inexpensive simple procedure at a low-temperature process of 80°C. The experimental results for a tri-layer of Al-PAA-Al inductor exhibits a measured wide tuning range of 31% with inductor variation of 6.5–8.5 nH at 3 GHz and a quality factor of 6 on low-resistivity Si substrate. To improve the quality factor, bimorph layers of gold and PAA are fabricated on alumina substrates. The quality factor has greatly improved. A peak quality factor of over 20 with a tuning range of 18% is demonstrated.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it