Pulsed laser deposition of c-axis oriented aluminum nitride thin films on silicon
Bibliographic record
Abstract
Results on the deposition of aluminum nitride thin films on silicon (111) substrates by pulsed laser deposition are reported. A KrF excimer laser was used to ablate in vacuum an AlN target. The intensity and the repetition rate of the laser as well as the substrate temperature were varied and their effects on film properties were determined. The AlN films were characterized by several techniques such as in situ laser interferometry, X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy and transmission electron microscopy. At a deposition temperature of 500 °C and a laser intensity of 1 × 108 W/cm2, highly oriented AlN layers are deposited. Increasing the laser intensity leads to the presence of metallic Al in the films. As temperature is increased from 500 to 920 °C, the growth rate is found to decrease but the crystalline structure as well as the smoothness of the films are both significantly improved. It is also found that a reduction of the growth rate by varying the repetition rate from 30 to 10 Hz leads to a further improvement of the crystalline quality of the AlN layers.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".