Electrical characterization of 5 keV phosphorous implants in silicon
Bibliographic record
Abstract
Si(100) wafers were implanted with 5-keV phosphorous (fluences of 1×1014–1×1016cm−2) and then annealed at 600–1000 °C, for 30 s or for 5 mins, to study shallow junction formation. Carrier densities were obtained by Van de Pauw Hall measurements, and carrier concentrations were depth profiled via a native-oxide stripping, differential Hall technique. For implanted fluences ⩾5×1014cm−2, an amorphous silicon surface layer is created. This results in solid-phase epitaxial growth at low annealing temperatures (600 °C), with reverse annealing upon dissolution of end-of-range interstitial clusters at higher temperatures (>700°C). Sheet resistances as low as 20Ω∕sq with electrical activation approaching 100% were achieved after annealing at 1000 °C.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".