MétaCan
Menu
Back to cohort
Record W2066147506 · doi:10.1063/1.373714

Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma

2000· article· en· W2066147506 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Applied Physics · 2000
Typearticle
Languageen
FieldEngineering
TopicPlasma Diagnostics and Applications
Canadian institutionsPolytechnique Montréal
Fundersnot available
KeywordsRadio frequencyMicrowavePlasmaMaterials scienceIonPulse (music)Capacitive sensingContinuous waveResistive touchscreenAtomic physicsVoltageOptoelectronicsChemistryOpticsPhysicsLaserElectrical engineering

Abstract

fetched live from OpenAlex

In the present work we systematically study the ion energy distribution functions (IEDFs) in argon discharges produced by a combination of pulsed (1–2 kHz) microwave (MW) and continuous wave (cw) radio frequency (rf) excitations. We show that the IEDFs for the pulsed MW discharges are structured, with individual features originating from different periods of the pulse. In the dual-mode MW/rf discharge, significant modulation of the self-bias voltage, Vb, during the MW pulse cycle is observed, which we attribute to changes in the overall plasma impedance: We demonstrate that in the pulsed-MW/cw-rf mode the impedance is highly resistive when the MW signal is on, while it is predominantly capacitive during the period between individual pulses. Using the measured time evolution of Vb in combination with time-resolved measurements of individual ion species, IEDFs at the rf-powered electrode at each instant of the MW pulse have been obtained. This approach is then used to reconstruct the total IEDF in pulsed-MW/cw-rf plasma in order to determine the total energy delivered by the impacting ions.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.401
Threshold uncertainty score0.592

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.209
Teacher spread0.198 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it