Novel Beam Design for Compact RF MEMS Series Switches
Bibliographic record
Abstract
This paper presents two novel integrated RF MEMS series contact switches for broadband applications. The proposed designs are based on cantilever and clamped-clamped beams that can be easily integrated in large multi-port structures. A novel set of dimples are integrated in the cantilever type switch to prevent the unwanted warpage of the beam resulting from the residual stress of the fabrication process. The switches are fabricated using a metal based six-mask process. The results illustrate smooth beams with excellent RF performance. The cantilever beam switch shows an actuation voltage of 60 V with better than a 0.35 dB insertion loss and a 24 dB return loss up to 40 GHz. The isolation of the switch is 22 dB for all the frequency band of interest. The clamped-clamped beam switch results are also presented indicating enhanced isolation of 26 dB up to 40 GHz with 0.5 dB insertion loss.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".