Novel Beam Design for Compact RF MEMS Series Switches
Bibliographic record
Abstract
This paper presents two novel integrated RF MEMS series contact switches for broadband applications. The proposed designs are based on cantilever and clamped-clamped beams that can be easily integrated in large multi-port structures. A novel set of dimples are integrated in the cantilever type switch to prevent the unwanted warpage of the beam resulting from the residual stress of the fabrication process. The switches are fabricated using a metal based six-mask process. The results illustrate smooth beams with excellent RF performance. The cantilever beam switch shows an actuation voltage of 60 V with better than a 0.35 dB insertion loss and a 24 dB return loss up to 40 GHz. The isolation of the switch is 22 dB for all the frequency band of interest. The clamped-clamped beam switch results are also presented indicating enhanced isolation of 26 dB up to 40 GHz with 0.5 dB insertion loss.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.007 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".