Tunable (Ba, Sr)TiO<sub>3</sub> interdigital capacitor onto Si wafer for reconfigurable radio
Bibliographic record
Abstract
Abstract In this article, the potential feasibility of integrating BST films into Si wafer by adopting tunable interdigital capacitor (IDC) with TiO 2 thin film buffer layer is suggested. TiO 2 as buffer layer is grown onto Si substrate by atomic layer deposition and the coplanar IDC on Ba x Sr 1−x TiO 3 (500 nm)/TiO 2 (50 nm)/high resistivity Si (HR‐Si) is fabricated. BST interdigital tunable capacitors integrated on HR‐Si substrate with high tunability and low loss tangent are characterized for their microwave performances. BST/HR‐Si and BST/TiO 2 /HR‐Si IDCs show much enhanced tunability values of 31% and 40%, respectively as compared to the value of 21% obtained with BST film on MgO single crystal substrate at the bias of 5 kV/cm. BST/TiO 2 /HR‐Si structure shows much improved figure of merit of 504.4 as compared to 418.53 and 101.68 of BST/MgO and BST/HR‐Si structure, respectively. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 2144–2148, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22657
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".