Hysteresis-free deposition of niobium oxide films by HiPIMS using different pulse management strategies
Bibliographic record
Abstract
Abstract We systematically investigate the reactive behaviour of two types of high-power pulsed magnetron discharges above a Nb target using either square voltage pulses (denoted as HiPIMS) or custom-shaped pulses (denoted as MPPMS), and compare it with that of a dc magnetron sputtering (DCMS) discharge. We demonstrate that the surface metal oxides can be effectively sputter-eroded from the target during both HiPIMS and MPPMS pulses operated in reactive O2/Ar gas mixtures, and that sputtering from a partially oxide-free target is possible even at high oxygen concentrations. This results in a hysteresis-free deposition process which allows one to prepare optically transparent high refractive index Nb2O5 coatings exhibiting an elevated deposition rate without the need for feedback control commonly used in reactive DCMS. The cathode voltage was identified as the principal parameter that affects the reactive discharge behaviour.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".