Sputter Deposition of Anatase Titanum Dioxide Transparent Conducting Films
Bibliographic record
Abstract
We report recent progress on sputter-deposition of Ti0.94Nb0.06O2 polycrystalline (poly-TNO) thin films as ITO-alternative transparent conductor. In order to achieve low resistivity (ρ) in TNO, it is necessary to introduce oxygen deficiencies into anatase phase. However, growth of poly-TNO films on glass under relatively reducing atmosphere tends to stabilize the rutile phase with higher resistivity. We overcame this difficulty by developing a bi-layer technique using a TNO seed-layer, which prevents the formation of the rutile phase even under reducing deposition conditions. As a result, we succeeded in directly fabricating poly-TNO films with ρ of ~1×10-3 Ω cm and visible transmittance of 60~80%, although we still need to further improve these properties towards practical applications. By comparing carrier transport properties between poly-TNO films obtained by different synthesis routes, we discuss on material parameters that govern resistivity of poly-TNO films.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".