Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure
Bibliographic record
Abstract
An ultrahigh vacuum apparatus for the deposition of thin films with controlled three-dimensional nanometer-scale structure is described. Our system allows an alternate, faster, cheaper way of obtaining nanoscale structured thin films when compared to traditional procedures of patterning and etching. It also allows creation of porous structures that are unattainable with known techniques. The unique feature of this system is the dynamic modification of the substrate tilt and azimuthal orientation with respect to the vapor source during deposition of a thin film. Atomic-scale geometrical shadowing creates a strong directional dependence in the aggregation of the film, conferring control over the resulting morphological structure on a scale of less than 10 nm. Motion can create pillars, helixes, zig–zags, etc. Significant features of the apparatus include variable substrate temperature, insertion and removal of specimens from atmospheric conditions without venting the deposition system, computer controlled process parameters, and in situ analysis capabilities. The deposition system was successfully employed for the fabrication of a variety of nanostructured thin films with a wide range of potential applications.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.003 | 0.002 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".