Hot Carrier Effect on Gate-Induced Drain Leakage Current in n-MOSFETs with HfO2∕Ti1-xNx Gate Stacks
Bibliographic record
Abstract
This paper investigates the effect of channel hot carrier stress (CHCS) on gate-induced drain leakage (GIDL) current in n-type metal-oxide-semiconductor field effect transistor (n-MOSFETs) with HfO2/Ti1-xNx gate stacks. It was found that the behavior of GIDL current during CHCS has dependence with the interfacial layer (IL) oxide thickness of high-k/metal gate stacks. As IL thickness becomes thinner, the GIDL current has a gradual decrease during CHCS, which is contrary to the result of thick-oxide IL devices. Based on the variation of GIDL current (ΔIGIDL) in different stress voltage across gate and drain terminals, trap-assisted band to band holes injection model was proposed to explain the different behavior of GIDL current for different IL thickness. Furthermore, we also investigated the impact of different Ti1-xNx composition of metal gate electrode on the ΔIGIDL after CHCS, and observed that the magnitude of ΔIGIDL decreases with the increase of nitride ratio. This is due to the fact that nitride atoms diffusing from the metal gate fill up oxygen vacancies, and reduce the concentration of traps in high-k dielectric.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".