Resistivity of thin Cu films coated with Ta, Ti, Ru, Al, and Pd barrier layers from first principles
Bibliographic record
Abstract
We present an atomistic first-principles calculation for the resistivity of rough Cu thin films coated with barrier layers of Ta, Ti, Ru, Al, and Pd. A significant difference in resistivity due to different barrier metals is found. Ti, Ta, and Ru barriers increase the resistivity whereas Al and Pd lower the resistivity, in comparison with that of bare Cu films having the same degree of roughness disorder. It is found that Al/Pd barrier atoms produce density of states (DOS) that match rather well with the DOS of Cu atoms on a Cu film with a perfectly flat surface while the DOS of Ti, Ta, and Ru do not match. Our results suggest that the geometrical roughness on the Cu film that causes diffuse scattering, can be ``smoothed'' out electronically by certain barriers such that the surface scattering becomes more specular.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".